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Subject Item
clgr:IEEE_Transactions_on_Semiconductor_Manufacturing
rdf:type
clgo:Publication_established_in_1988 clgo:Quarterly_journal clgo:Semiconductor_journal owl:NamedIndividual clgo:English-language_journal clgo:IEEE_academic_journal
rdfs:label
IEEE Transactions on Semiconductor Manufacturing
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dbr:IEEE_Transactions_on_Semiconductor_Manufacturing
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skos:prefLabel
IEEE Transactions on Semiconductor Manufacturing
skos:altLabel
Semiconductor Manufacturing, IEEE Transactions on IEEE Transactions on Nanotechnology
clgo:abbreviation
IEEE Trans. Semicond. Manuf.
clgo:academicDiscipline
clgr:Semiconductor clgr:Semiconductor_device_fabrication clgr:Engineering clgr:Physics
clgo:firstPublicationYear
1988
clgo:frequencyOfPublication
Quarterly
clgo:impactFactor
2.874
clgo:impactFactorAsOf
2020
clgo:issn
1558-2345 0894-6507
clgo:lccn
88659341
clgo:oclc
16152423
clgo:publisher
clgr:Institute_of_Electrical_and_Electronics_Engineers