<http://caligraph.org/resource/Nanosystem%20Fabrication%20Facility_(21350657)>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://caligraph.org/ontology/Semiconductor_fabrication_plant> .
<http://caligraph.org/resource/Nanosystem%20Fabrication%20Facility_(21350657)>	<http://www.w3.org/2004/02/skos/core#prefLabel>	"Nanosystem Fabrication Facility" .
<http://caligraph.org/resource/Nanosystem%20Fabrication%20Facility_(21350657)>	<http://www.w3.org/2000/01/rdf-schema#label>	"Nanosystem Fabrication Facility" .
<http://caligraph.org/resource/Nanosystem%20Fabrication%20Facility_(21350657)>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/2002/07/owl#NamedIndividual> .
<http://caligraph.org/resource/Nanosystem%20Fabrication%20Facility_(21350657)>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://en.wikipedia.org/wiki/List_of_semiconductor_fabrication_plants> .