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About:
clgo:
Microelectronic_and_microelectromechanical_system
Property
Value
rdf:
type
owl:
Class
rdfs:
label
Microelectronic and microelectromechanical system
rdfs:
subClassOf
owl:
Thing
prov:
wasDerivedFrom
http://en.wikipedia.org/wiki/Category:Microelectronic_and_microelectromechanical_systems
is
rdf:
type
of
Microelectromechanical system oscillator
Nanoelectromechanical relay
Surface activated bonding
Surface micromachining
CEA-Leti: Laboratoire d'électronique des technologies de l'information
Trojan wave packet
Scratch drive actuator
Fariborz Maseeh
Microscanner
Surface acoustic wave sensor
Bulk micromachining
Smartdust
Microelectromechanical systems
Micromirror device
Radio-frequency microelectromechanical system
InvenSense
Electromechanical modeling
Bio-MEMS
Piezoelectric microelectromechanical systems
Three-Axis Acceleration Switch