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About:
clgo:
Semiconductor_fabrication_material
Property
Value
rdf:
type
owl:
Class
rdfs:
label
Semiconductor fabrication material
rdfs:
subClassOf
Semiconductor material
prov:
wasDerivedFrom
http://en.wikipedia.org/wiki/Category:Semiconductor_fabrication_materials
is
rdf:
type
of
High-κ dielectric
Low-κ dielectric
Ion implantation-induced nanoparticle formation
Indium gallium zinc oxide
Fluorosilicate glass
Gate oxide
Silicon nitride
Germanane