Atomic layer deposition

Property	Value
rdf:type	owl:NamedIndividual Finnish invention Semiconductor material Soviet invention Multiple discovery Chemical process
rdfs:label	Atomic layer deposition
owl:sameAs	dbr:Atomic_layer_deposition
prov:wasDerivedFrom	http://en.wikipedia.org/wiki/Category:Chemical_processes http://en.wikipedia.org/wiki/Filippo_Berto http://en.wikipedia.org/wiki/Category:Finnish_inventions http://en.wikipedia.org/wiki/List_of_semiconductor_materials http://en.wikipedia.org/wiki/List_of_multiple_discoveries http://en.wikipedia.org/wiki/Category:Soviet_inventions http://en.wikipedia.org/wiki/Semiconductor_device_fabrication
skos:prefLabel	Atomic layer deposition
skos:altLabel	ALD Atomic Layer Deposition Atomic layer deposition (ALD) atomic layer deposition atomic layer deposition (ALD) transition metal nitrides
is clgo:knownFor of	Valentin Aleskovsky Stacey Bent Charles Musgrave Tuomo Suntola

About: clgr:Atomic_layer_deposition