Extreme ultraviolet lithography

Property	Value
rdf:type	owl:NamedIndividual Laser article Plasma physics article
rdfs:label	Extreme ultraviolet lithography
owl:sameAs	dbr:Extreme_ultraviolet_lithography
prov:wasDerivedFrom	http://en.wikipedia.org/wiki/Category:Main_topic_classifications http://en.wikipedia.org/wiki/Index_of_physics_articles_(D) http://en.wikipedia.org/wiki/List_of_laser_articles http://en.wikipedia.org/wiki/List_of_plasma_physics_articles http://en.wikipedia.org/wiki/Advanced_Light_Source http://en.wikipedia.org/wiki/Lawrence_Livermore_National_Laboratory http://en.wikipedia.org/wiki/Moore's_law http://en.wikipedia.org/wiki/Nanochemistry http://en.wikipedia.org/wiki/Microsystems_Technology_Office
skos:prefLabel	Extreme ultraviolet lithography
skos:altLabel	13.5 nm extreme ultraviolet (EUV) lithography 30 nm EUV EUV lithography EUV-Lithographie EUVL deep ultraviolet lithography extreme ultraviolet extreme ultraviolet (EUV) lithography extreme ultraviolet lithography lithography much shorter than visible light
is clgo:knownFor of	David Attwood (physicist)

About: clgr:Extreme_ultraviolet_lithography