PropertyValue
rdf:type
rdfs:label
  • IEEE Transactions on Semiconductor Manufacturing
owl:sameAs
prov:wasDerivedFrom
skos:prefLabel
  • IEEE Transactions on Semiconductor Manufacturing
skos:altLabel
  • IEEE Transactions on Nanotechnology
  • Semiconductor Manufacturing, IEEE Transactions on
clgo:abbreviation
  • IEEE Trans. Semicond. Manuf.
clgo:academicDiscipline
clgo:firstPublicationYear
  • 1988
clgo:frequencyOfPublication
  • Quarterly
clgo:impactFactor
  • 2.874
clgo:impactFactorAsOf
  • 2020
clgo:issn
  • 0894-6507
  • 1558-2345
clgo:lccn
  • 88659341
clgo:oclc
  • 16152423
clgo:publisher