Ion implantation - CaLiGraph

Property	Value
rdf:type	owl:NamedIndividual
rdfs:label	Ion implantation
owl:sameAs	dbr:Ion_implantation
prov:wasDerivedFrom	http://en.wikipedia.org/wiki/Plasma_(physics) http://en.wikipedia.org/wiki/Plasma-facing_material http://en.wikipedia.org/wiki/Semiconductor_device_fabrication
skos:prefLabel	Ion implantation
skos:altLabel	implant implants paths implanted implantation ions ion channeling Ion Implantation Ion Implanters Ion implanters implantation chemistries implanted with ions ion beam implantation ion beam implanters ion implantation ion implantation in solids ion implanted ion implanter ion implanters ionic implantation plasma immersion ion implantation
is clgo:academicDiscipline of	Igor Serafimovich Tashlykov
is clgo:knownFor of	William Shockley

About: clgr:Ion_implantation