PropertyValue
rdf:type
rdfs:label
  • Photolithography
owl:sameAs
prov:wasDerivedFrom
skos:prefLabel
  • Photolithography
skos:altLabel
  • photomechanical reproduction
  • optical
  • 2D
  • Lithography
  • aspect ratio
  • fabricated
  • lithography
  • Critical Dimension
  • Photolithography#Projection
  • Photolitography machines
  • Process
  • UV photolithography
  • chip lithography
  • lithographic
  • lithographic film
  • lithographic methods
  • lithographic processes
  • lithographically
  • lithographically patterned
  • microelectronics manufacturing process
  • offset litho printing
  • optical lithography
  • optical lithography equipment
  • patterning
  • photo etched
  • photo lithography
  • photo-etched
  • photo-etching
  • photo-lithio
  • photo-lithographic
  • photolithograph
  • photolithographed
  • photolithographer
  • photolithographic
  • photolithographic fabrication
  • photolithographic fabrication technologies
  • photolithographic processes
  • photolithographic systems
  • photolithographically
  • photolithography
  • photoresist masking
  • potholithographic
  • proximity lithography
  • subwavelength resolution
is clgo:knownFor of
is clgo:product of