Plasma-enhanced chemical vapor deposition

Property	Value
rdf:type	owl:NamedIndividual Plasma physic Plasma physics article
rdfs:label	Plasma-enhanced chemical vapor deposition
owl:sameAs	dbr:Plasma-enhanced_chemical_vapor_deposition
prov:wasDerivedFrom	http://en.wikipedia.org/wiki/List_of_plasma_physics_articles http://en.wikipedia.org/wiki/Category:Plasma_physics http://en.wikipedia.org/wiki/Chemical_vapor_deposition
skos:prefLabel	Plasma-enhanced chemical vapor deposition
skos:altLabel	PECVD Plasma CVD Plasma enhanced CVD Plasma-enhanced CVD Plasma-enhanced_chemical_vapor_deposition plasma assisted chemical vapor deposition plasma deposition plasma enhanced CVD plasma-enhanced chemical vapor deposition
is clgo:product of	SAMCO

About: clgr:Plasma-enhanced_chemical_vapor_deposition