Plasma cleaning - CaLiGraph

Property	Value
rdf:type	owl:NamedIndividual Plasma physics article Cleaning method
rdfs:label	Plasma cleaning
owl:sameAs	dbr:Plasma_cleaning
prov:wasDerivedFrom	http://en.wikipedia.org/wiki/Cleaning http://en.wikipedia.org/wiki/Category:Cleaning_methods http://en.wikipedia.org/wiki/Plasma_processing http://en.wikipedia.org/wiki/Index_of_physics_articles_(P) http://en.wikipedia.org/wiki/List_of_plasma_physics_articles http://en.wikipedia.org/wiki/Brad_Mattson http://en.wikipedia.org/wiki/Central_Mechanical_Engineering_Research_Institute
skos:prefLabel	Plasma cleaning
skos:altLabel	cleaning Oxygen-Plasma Plasma-chemical purification high power radio waves, which ionise it plasma cleaning plasma-assisted surface cleaning ultra-fine cleaning
is clgo:product of	SAMCO

About: clgr:Plasma_cleaning