Reactive-ion etching

Property	Value
rdf:type	owl:NamedIndividual Plasma physics article
rdfs:label	Reactive-ion etching
owl:sameAs	dbr:Reactive-ion_etching
prov:wasDerivedFrom	http://en.wikipedia.org/wiki/Inductively_coupled_plasma http://en.wikipedia.org/wiki/Silicon_nanowire http://en.wikipedia.org/wiki/List_of_plasma_physics_articles http://en.wikipedia.org/wiki/Semiconductor_device_fabrication
skos:prefLabel	Reactive-ion etching
skos:altLabel	remove RIE ICP-RIE RIE (reactive ion etching) ion bombardment plasma-assisted reactive ion etching reactive ion etch reactive ion etching reactive-ion etching reactive-ion-etching
is clgo:product of	SAMCO

About: clgr:Reactive-ion_etching